000 00541nam a2200205Ia 4500
001 59459
005 20250221160300.0
008 250214s9999||||xx |||||||||||||| ||und||
020 _a9788132204954
100 _aCui, Zheng
245 0 _aNanofabrication : principles, capabilities and limits
260 _aNew Delhi
260 _bSpringer
260 _c2008
500 _aIncludes bibliographical references and index
650 _aNanofabrication
650 _aNanoscale pattern transfer
650 _aNanotechnology
942 _cBK
999 _c75229
_d75229