000 | 00541nam a2200205Ia 4500 | ||
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001 | 59459 | ||
005 | 20250221160300.0 | ||
008 | 250214s9999||||xx |||||||||||||| ||und|| | ||
020 | _a9788132204954 | ||
100 | _aCui, Zheng | ||
245 | 0 | _aNanofabrication : principles, capabilities and limits | |
260 | _aNew Delhi | ||
260 | _bSpringer | ||
260 | _c2008 | ||
500 | _aIncludes bibliographical references and index | ||
650 | _aNanofabrication | ||
650 | _aNanoscale pattern transfer | ||
650 | _aNanotechnology | ||
942 | _cBK | ||
999 |
_c75229 _d75229 |