000			00615nam a2200229Ia 4500
001			60275
005			20250221160446.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a3000063951
100			_aBasting, Dirk, ed.
245		0	_aExcimer laser technology : laser sources, optics, systems and applications
260			_aGermany
260			_bLambda Physik AG
260			_c2001
300			_a292p. : col.ill.
500			_aIncludes bibliographical references and index
650			_aLaser optics
650			_aLaser physics
650			_aLaser technology
650			_aOptics
942			_cBK
999			_c76041 _d76041