000			00780nam a2200265Ia 4500
001			62687
005			20250221160532.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a9780824758240
100			_aAllen, James J
245		0	_aMicro electro mechanical system design
260			_aBaca Raton
260			_bTaylor and Francis
260			_c2005
300			_a465p.
500			_aIncludes bibliographical references and index
650			_aChemical mechanical polishing
650			_aElectromechanics
650			_aEngineering design
650			_aMechanics -- Micrelectro mechanics
650			_aMEMS Tools and Technics
650			_aMetal polishing -- Chemical mechanical polishing
650			_aMicroelectromechanical systems (
942			_cBK
999			_c78133 _d78133