000			00525nam a2200205Ia 4500
001			62938
005			20250221160536.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a9780857091185
100			_aKraft, Michael, ed.
245		0	_aMEMS for automotive and aerospace applications
260			_aUK
260			_bWoodhead publishing
260			_c2013
300			_axv, 342p.
500			_aIncludes bibliographical references and index
650			_aMEMS
700			_aWhite, Neil M, ed.
942			_cBK
999			_c78326 _d78326