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The science and engineering of microelectronic fabrication

Campbell, Stephen A

The science and engineering of microelectronic fabrication - New York Oxford University Press 1996 - xv, 536p.

Includes index

ISBN: 195105087

Subjects--Topical Terms:
Microelectronics--Semiconductors--Design and Construction

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Central Library - Coimbatore

The science and engineering of microelectronic fabrication