The science and engineering of microelectronic fabrication (Record no. 30138)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00530nam a2200193Ia 4500 |
| 001 - CONTROL NUMBER | |
| control field | 14090 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250221150739.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 250214s9999||||xx |||||||||||||| ||und|| |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 195105087 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A |
| 245 #4 - TITLE STATEMENT | |
| Title | The science and engineering of microelectronic fabrication |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Oxford University Press |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | 1996 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xv, 536p. |
| 500 ## - GENERAL NOTE | |
| General note | Includes index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics--Semiconductors--Design and Construction |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | BOOKS |
| Date last seen | Total checkouts | Full call number | Barcode | Price effective from | Koha item type | Lost status | Damaged status | Not for loan | Withdrawn status | Home library | Current library | Shelving location | Date acquired | Cost, normal purchase price |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 21.02.2025 | 621.382 N63;1 | 14090 | 21.02.2025 | BOOKS | AMRITA SCHOOL OF ENGINEERING | AMRITA SCHOOL OF ENGINEERING | C18-R1 | 21.02.2025 | 295.00 |