Introduction to microelectronic fabrication - Vol. 5
Jaeger, Richard C
Introduction to microelectronic fabrication - Vol. 5 - 2 - New Jersey Prentice-Hall 2002 - xiv, 316p. - Modular series on solid state devices .
Includes bibliographical references and index
201444941
MEMS -- Microelectronic mechanical systems
Microelectronics -- MOS and CMOS (Metal oxide semiconductor, Complimentary) -- Fabrication
Introduction to microelectronic fabrication - Vol. 5 - 2 - New Jersey Prentice-Hall 2002 - xiv, 316p. - Modular series on solid state devices .
Includes bibliographical references and index
201444941
MEMS -- Microelectronic mechanical systems
Microelectronics -- MOS and CMOS (Metal oxide semiconductor, Complimentary) -- Fabrication