Introduction to microelectronic fabrication - Vol. 5 (Record no. 41120)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00709nam a2200229Ia 4500 |
| 001 - CONTROL NUMBER | |
| control field | 25204 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250221152337.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 250214s9999||||xx |||||||||||||| ||und|| |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 201444941 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Jaeger, Richard C |
| 245 #0 - TITLE STATEMENT | |
| Title | Introduction to microelectronic fabrication - Vol. 5 |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New Jersey |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Prentice-Hall |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | 2002 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 316p. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Modular series on solid state devices |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | MEMS -- Microelectronic mechanical systems |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics -- MOS and CMOS (Metal oxide semiconductor, Complimentary) -- Fabrication |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | BOOKS |
| Date last seen | Total checkouts | Full call number | Barcode | Price effective from | Koha item type | Lost status | Damaged status | Not for loan | Collection | Withdrawn status | Home library | Current library | Shelving location | Date acquired | Cost, normal purchase price |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 21.02.2025 | 621.382 P25 | 25204 | 21.02.2025 | BOOKS | TEXT BOOK | AMRITA SCHOOL OF ENGINEERING | AMRITA SCHOOL OF ENGINEERING | C19-R2 | 21.02.2025 | 1075.00 |