Microchip fabrication: a practical guide to semiconductor processing
Van Zant, Peter
Microchip fabrication: a practical guide to semiconductor processing - 4 - Singapore McGraw-Hill 2000 - xvi, 632p.
Includes bibliographical references and index
007118421x
Crystalline materials
Integrated circuit formation
Photolithography process --Patterning
Semiconductors -- Materials and Process chemicals
Wafers -- Manufacturing and Fabrication
Microchip fabrication: a practical guide to semiconductor processing - 4 - Singapore McGraw-Hill 2000 - xvi, 632p.
Includes bibliographical references and index
007118421x
Crystalline materials
Integrated circuit formation
Photolithography process --Patterning
Semiconductors -- Materials and Process chemicals
Wafers -- Manufacturing and Fabrication