Microchip fabrication: a practical guide to semiconductor processing (Record no. 43802)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00760nam a2200253Ia 4500 |
| 001 - CONTROL NUMBER | |
| control field | 27959 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250221152436.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 250214s9999||||xx |||||||||||||| ||und|| |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 007118421x |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Van Zant, Peter |
| 245 #0 - TITLE STATEMENT | |
| Title | Microchip fabrication: a practical guide to semiconductor processing |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 4 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Singapore |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | McGraw-Hill |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | 2000 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xvi, 632p. |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Crystalline materials |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuit formation |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Photolithography process --Patterning |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors -- Materials and Process chemicals |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Wafers -- Manufacturing and Fabrication |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | BOOKS |
| Date last seen | Total checkouts | Full call number | Barcode | Price effective from | Koha item type | Lost status | Damaged status | Not for loan | Collection | Withdrawn status | Home library | Current library | Shelving location | Date acquired | Cost, normal purchase price |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 21.02.2025 | 621.382 P093;1 | 27959 | 21.02.2025 | BOOKS | TEXT BOOK | AMRITA SCHOOL OF ENGINEERING | AMRITA SCHOOL OF ENGINEERING | C18-R4 | 21.02.2025 | 947.00 |