Normal view MARC view ISBD view

X-ray metrology in semiconductor manufacturing

Bowen, Keith, D

X-ray metrology in semiconductor manufacturing - New York CRC Press 2006 - 279p.

Includes bibliographical references and index

ISBN: 0-8493-3928-6

Subjects--Topical Terms:
Crystals --
Metrology -- Semiconductor design and Manufacture
Mosaic metrology
Phase metrology
Polycrystals
Semiconductors -- Design andmanufacture
Single crystal
Thickness metrology
Wafer metrology -- Semiconductor industry

Print
Cite
Add to your cart (remove)
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

Central Library - Coimbatore

X-ray metrology in semiconductor manufacturing