X-ray metrology in semiconductor manufacturing (Record no. 51167)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00859nam a2200301Ia 4500 |
| 001 - CONTROL NUMBER | |
| control field | 35367 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250221153249.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 250214s9999||||xx |||||||||||||| ||und|| |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0-8493-3928-6 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Bowen, Keith, D |
| 245 #0 - TITLE STATEMENT | |
| Title | X-ray metrology in semiconductor manufacturing |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | CRC Press |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | 2006 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 279p. |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Crystals -- |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Metrology -- Semiconductor design and Manufacture |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Mosaic metrology |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Phase metrology |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Polycrystals |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors -- Design andmanufacture |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Single crystal |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Thickness metrology |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Wafer metrology -- Semiconductor industry |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Tanner, Brian, K |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | BOOKS |
| Date last seen | Total checkouts | Full call number | Barcode | Price effective from | Koha item type | Lost status | Damaged status | Not for loan | Collection | Withdrawn status | Home library | Current library | Shelving location | Date acquired | Cost, normal purchase price |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 21.02.2025 | 621.382 P62 | 35367 | 21.02.2025 | BOOKS | Not for loan | REFERENCE | AMRITA SCHOOL OF ENGINEERING | AMRITA SCHOOL OF ENGINEERING | RF54-R1 | 21.02.2025 | 6704.00 |