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The physics of micro/nano-fabrication

By: Contributor(s): Material type: TextTextPublication details: New York; Plenum Press; 1992Description: xix, 771pISBN:
  • 9788184894134
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Item type Home library Call number Status Barcode
BOOKS BOOKS AMRITA SCHOOL OF ENGINEERING 620.3:62 N20 (Browse shelf(Opens below)) Available 58053

Includes bibliographical references and index

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