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1.
Micromechanics and MEMS by
Material type: Text Text
Publication details: New York ; IEEE Press ; 1997
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF54-R1 621.382 P22.

2.
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Mechanical microsensors by Series: Microtechnology and MEMS
Material type: Text Text
Publication details: New York ; Springer Verlag ; 2001
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF51-R4 621.317.73 P12.

3.
Fundamentals of microfabrication science of miniaturization by
Edition: 2
Material type: Text Text
Publication details: Boca Raton ; CRC Press ; 2002
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: C19-R1 621.382 P20.

4.
The MEMS handbook by Series: The Mechanical engineering handbook series
Material type: Text Text
Publication details: Boca Raton ; CRC Press ; 2002
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF12-R3 621.01(035) P20.

5.
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MEMS and microsystems : design and manufacture by
Material type: Text Text
Publication details: New Delhi ; Tata McGraw-Hill ; 2002
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (6)Location, call number: C19-R2 621.382 P26, ...

6.
MEMS and NEMS : systems, devices and structures by
Material type: Text Text
Publication details: New York ; CRC Press ; 2002
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF54-R1 621.382 P292.

7.
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Micro electro mechanical system design by
Material type: Text Text
Publication details: New York ; Taylor and Francis ; 2005
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: C20-R1 621.382 P52. Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF54-R1 621.382 P52.

8.
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Semiconductor manufacturing handbook by
Material type: Text Text
Publication details: New York ; McGraw-Hill ; 2005
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF14-R4 621.382(035) P5.

9.
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Introduction to microfabrication by
Material type: Text Text
Publication details: New York ; John Wiley ; 2004
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF54-R1 621.382 P45.

10.
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Mechatronic systems : fundamentals by
Material type: Text Text
Publication details: New Delhi ; Springer ; 2005
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: C67-R3 621.81:621.38 P51.

11.
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foundations of MEMS by
Material type: Text Text
Publication details: New Jersey ; Pearson Education ; 2006
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: C20-R1 621.382 P6.

12.
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Modeling MEMS and NEMS by
Material type: Text Text
Publication details: New York ; CRC Press ; 2003
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF54-R1 621.382 P34.

13.
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Mechatronics by
Material type: Text Text
Publication details: New Delhi ; Prentice-Hall ; 2006
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: C67-R3 621.81:621.38 P61.

14.
MEMS and microstructures in aerospace applications by
Material type: Text Text
Publication details: Boca Raton ; CRC Press ; 2006
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF67-R2 629.73 P6.

15.
MEMS by
Material type: Text Text
Publication details: New Delhi ; Tata McGraw-Hill ; 2007
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: C20-R2 621.382 P73.

16.
Mechanics of microelectromechanical systems by
Material type: Text Text
Publication details: New York ; Kluwer Academic ; 2005
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: C21-R2 621.382:621.01 P5.

17.
Principles and applications of nanoMEMS physics by
Material type: Text Text
Publication details: New Delhi ; Springer ; 2005
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: C21-R2 621.382:620.3 P5.

18.
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Sensors handbook by
Edition: 2
Material type: Text Text
Publication details: McGraw-Hill ; New York ; 2010
Availability: Items available for reference: AMRITA SCHOOL OF ENGINEERING: Not for loan (1)Location, call number: RF14-R1 621.317.73(035) Q00.

19.
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Comprehensive microsystems - vol.1 : materials fabrication and packaging electronics and systems design by
Material type: Text Text
Publication details: Elsevier ; Netherlands ; 2008
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: Biomedical - Dlib 621.382 P84.1.

20.
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Comprehensive microsystems - Vol.2 : actuation mechanism physical sensing chemical and biological systems by
Material type: Text Text
Publication details: Elsevier ; Netherlands ; 2008
Availability: Items available for loan: AMRITA SCHOOL OF ENGINEERING (1)Location, call number: Biomedical - Dlib 621.382 P84.2.

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