Introduction to microelectronic fabrication - Vol. 5
Material type:
TextSeries: Modular series on solid state devicesPublication details: New Jersey; Prentice-Hall; 2002Edition: 2Description: xiv, 316pISBN: - 201444941
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AMRITA SCHOOL OF ENGINEERING | TEXT BOOK | 621.382 P25 (Browse shelf(Opens below)) | Available | 25204 |
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| 621.382 P25 Introduction to microelectronic fabrication - Vol. 5 | 621.382 P26 MEMS and microsystems : design and manufacture | 621.382 P26 MEMS and microsystems : design and manufacture | 621.382 P26;1 MEMS and microsystems : design and manufacture |
Includes bibliographical references and index
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