X-ray metrology in semiconductor manufacturing

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Material type: Text

TextPublication details: New York; CRC Press; 2006Description: 279pISBN:

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Holdings
Item type	Home library	Collection	Call number	Status	Barcode
BOOKS	AMRITA SCHOOL OF ENGINEERING	REFERENCE	621.382 P62 (Browse shelf(Opens below))	Not for loan	35367

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Previous	621.382 P34 Modeling MEMS and NEMS	621.382 P45 Introduction to microfabrication	621.382 P52 Micro electro mechanical system design	621.382 P62 X-ray metrology in semiconductor manufacturing	621.382 P692 Noise in high-frequency circuits and oscillators	621.382 P81 Fabrication of siGe HBT BiCMOS technology	621.382 P82 Circuits and applications using silicon heterostructure devices	Next

Includes bibliographical references and index

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